SYNOPSYS中
光柵表面輸入格式:
>)V1aLu= SN GRATING {X/Y} L/MM ORDER CWAV HIN VNUM aaa6R|>0 其中,X-衍射發(fā)生在X-Z平面;Y-衍射發(fā)生在Y-Z平面。L/MM-給出了光柵刻線數(shù);ORDER-衍射級(jí)次;CWAV-波長(zhǎng);HIN-基底
折射率;
5
5$J%;& VNUM-相應(yīng)的阿貝數(shù);
Dht,!LVb; $G
$147z 例子:
{`X O3 RLE
^p@ # ID GRATING_REAL FLAT
57nSyd]PR WAVL .6000000 .5000000 .4000000
3W<_J_[ APS 1
eyUhMjd POLARIZATION LINEAR Y
BH@b]bEJ UNITS MM
nqnVFkGd9 OBB 0.000000 10.00000 1.00000 0.00000 0.00000 0.00000 1.00000
OE{PP9eh 0 AIR
at(oepq 1 GRA Y 500.0000 -1 0.500000 1.500000 50.000000
'f'zV@) 2 COATING PERF
zQPQP` 2 CV 0.0000000000000 TH 1.00000000E-06
;";#{B: 2 N1 1.51628919 N2 1.52140818 N3 1.53084089
iS/faXe5 2 CTE 0.710000E-05
.|Ee,Un 2 GTB S 'BK7 '
`X