如果採用 Code V 軟體,那麼可以用 SAGF 函數(shù)計(jì)算面深(Sag)量: ^__P;Gr`
SAGF(surface_num, zoom_pos, x_coord, y_coord) - Sag of the designated surface at x_coord, y_coord EEvi_Z932
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如果想知道的是某一非球面的型狀是否能由干涉儀測(cè)量,那麼 Code V 提供兩個(gè)函數(shù): VS65SxHA
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(1) 使用 Zygo 干涉儀 ~N)(|N
函數(shù) @VFA(zoom #, surface #, height) r>rL[`p(2
Surface is testable for @VFA < 1.0 V2g"5nYT
Surface is not testable for @VFA > 1.0 %2beoH'
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(2)使用 QED 干涉儀 sBNqg~HwB?
函數(shù) @SSIa(surface #, zoom #, height) 0;w84>M
0 <= @SSIa < 0.5 - surface is readily testable bvT$/(7
0.5 <= @SSIa < 1 - surface is marginally testable 8SCXA9}
@SSIa >= 1 - surface is difficult to test