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a060103112:氟化鎂一般不用離子源,只有偶爾冷鍍用,就只加少量氬氣 (2013-02-27 11:32) Mf#2.TR
j123456789:離子源充氧后會產(chǎn)生氧原子和氧離子,它們具有極其強(qiáng)的活性,作為氧化物膜沉積時的輔助,不僅能提高膜層的密度,還能改善其吸收!但,其會降低離子源的壽命!!充氬僅能提高膜層的密度,同時離子源的壽命會相對長! (2007-04-15 15:49) ftDVxKDE?S
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jiayuch:如果鍍得是氟化鎂 就用氬氣嗎 (2007-04-22 16:21) ?STI8AdO