| yazhuge |
2005-10-21 19:57 |
Refractive projection objective(折射投影物鏡)--版主繼續(xù)革命!!
Abstract dU6ou'pf Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. DwaBdN[!7 -------------------------------------------------------------------------------- OP~HdocB Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) aO]ZZleNS Correspondence Name and Address: SUGHRUE MION, PLLC =+/eLKG 2100 PENNSYLVANIA AVENUE, N.W. !Z`j2
e} SUITE 800 H;?{BV WASHINGTON {v=T [D DC fRrvNj0{V 20037 {E
p0TVj` US NgADKrDU V[{6e Assignee Name and Adress: CARL ZEISS SMT AG a;rdQ> W}--p fG Serial No.: 931051 yL%K4$z Series Code: 10 QP@%(]f
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