| 電子廠女工xp |
2024-05-14 08:52 |
Measuring the angles and pyramidal error of high-precision prisms
Measuring the angles and pyramidal error of high-precision prisms *VcJ= b
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High-precision prisms, having maximum angle tolerances }j%5t ~Qa
of 1 to 3 arcsec, find increasing application in optical metrology. L_T5nD^D
Reported interferometric techniques for measuring $I=~S[p
the wedge angles of such prisms achieve a precision of up AKC`TA*E
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques XwmL.Gg:]7
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric YWLj?+
methods have made use of goniometers,2 @5FQX
spectrometers,3 master prisms,4,5 and collimators.6 However, >Ry01G]_/h
in the literature there are few reported methods for ?
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measuring the pyramidal error, and the majority rely on \dVOwr
visual observation,2,7,8 by which it is only possible to measure Cr Lrw T
pyramidal errors to the order of 1 arcmin ~Ref. 8!. HtFD lvdy]
In the new arrangement presented here, one can measure DVA:Cmh\
the prism angle and the pyramidal error separately or in d-qUtgqV86
combination. This is possible because the measurements O-^Ma- }
are made simultaneously but with different techniques.
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