Abstract wLH>:yKUU  
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. y/{fX(aV  
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Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) nI-w}NQ  
Correspondence Name and Address:     SUGHRUE MION, PLLC 9'giU r  
  2100 PENNSYLVANIA AVENUE, N.W. /QWvW=F2<  
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Assignee Name and Adress: CARL ZEISS SMT AG 2!m/  
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Serial No.: 931051 9igiZmM  
Series Code: 10 /{aj}M0kN  
Filed: September 1, 2004 b9J_1Gl]  
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U.S. Current Class: 359/649 Vpz\.]  
U.S. Class at Publication: 359/649 Ts[_u@  
Intern'l Class: G02B 003/00; G02B 009/00 ^A$Zw+P  
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Foreign Application Data Ys!82M$g  
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Date Code Application Number HZC"nb}r4  
Sep 12, 2003 WO 03/075049 A2 {yHCXFWlS  
Feb 6, 2003 WO PCT/EP03/01147 P6-s0]-g  
Sep 12, 2003 WO 03/075096 A2 ghG**3xr  
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Claims Q:G4Z9Kt  
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