Abstract q'%[[<  
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. Ok}{jwJ%W;  
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Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) #.E\,N'  
Correspondence Name and Address:     SUGHRUE MION, PLLC K2x
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  2100 PENNSYLVANIA AVENUE, N.W. Gg=aK~q6  
  SUITE 800 #MhNdH#  
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Assignee Name and Adress: CARL ZEISS SMT AG P9 {}&z%:  
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