Abstract 8Mg wXH  
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. |$  
-------------------------------------------------------------------------------- >sGIpER7  
Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) J;wDvt]]1  
Correspondence Name and Address:     SUGHRUE MION, PLLC Q!.JV.(  
  2100 PENNSYLVANIA AVENUE, N.W. r^zra|]  
  SUITE 800 C)hS^D: